Category : Semiconductor

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  How does Dynamic SIMS allow optimizing implantation processes on SiC and GaN materials?

  Monday, March 25, 2024 | Laura CREON, Jinlei REN, Seoyoun CHOI, Marie ADIER

  Semiconductor

  Exploring enhanced performance in SiC and GaN devices via optimized doping profiles and the pivotal role of D-SIMS.

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